MEMSPEC is a unique MEMS testing and characterization station that was developed to satisfy in-house testing needs for the design and development of MEMS devices. MEMSPEC combines conventional wafer probing techniques with advanced metrology tools to test and characterize induced X - Y - Z axis motion of MEMS devices under vacuum. The system is completely automated from a computer control station allowing for real time analysis of the results. The MEMSPEC System is available as a complete system or can be contracted for testing services. Please see the brochure for complete system details.

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MEMSPEC Brochure